Dichlorsilane
SiH2Cl2
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General Characteristics Health Hazards Material Recommendations
A colorless, corrosive, liquefied and flammable gas with a penetrating odor. Forms white smoke in moist air. Forms hydrogen chloride in contact with water.
A highly toxic material. Attacks eyes and mucous membranes. Can causes lung damage.
Nickel and stainless steel. Highly corrosive in the presence of moisture.
TLV-TWA Flammable Limits DOT Class / Label
500 ppm 4.1 - 99% 2.3 / Poison Gas
Molecular Weight Specific Gravity Specific Volume
101.0 3.52 @ 77 F 3.830 cu.ft./lb @ 70 F
CGA Valve Outlet CAS Registry No. UN Number
678 4109-96-0 2189
National Stock Number (NSN) Applicable to Dichlorosilane MIL Specs/ Fed Specs
MSDS for Dichlorosilane


Grade
Part #
Purity Minimum Cylinder
Size
Volume
Lbs.
Pressure
@ 70 F
Comments
Electronic
470200
99.0% Min.
>400 ohm-cm
N-type
Liquid Phase
049
044
007
003
90
50
10
5
9
9
9
9

None


Uses: Dichlorosilane is used chiefly in the deposition of epitaxial silicon.